• IXL (IXL20) 無油式真空幫浦

    iXL 系列的乾式泵浦可 全面因應平面顯示器 (FPD)、 半導體及太陽能製造市場領域面臨的各項抽氣需求。

    這些性能領先的 泵浦,在設計上可大幅提升基質流通量,同時也大幅減少耗能、 體積及重量。此外,在檢修之間無須維護 。


        

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  • Small iXL Dry Pumps for Semi & Solar Applications
    Large iXL Dry Pumps for Harsh Applications
    IPUP for Applied Materials Process Platforms
  • Our History

    When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.

    Learn More about Our History