我們的 iH 乾式泵浦針對存有粉塵、可凝結或腐蝕性副產品的困難製程， 提供高度可靠且低成本的泵浦。iH 系列 具有一個五級泵浦，搭配創新的懸臂式、爪式與魯式轉子 設計，可以改善粉塵處理並降低排氣噪音。除此之外， iH 系列泵浦裝載了單級機械增壓泵浦與完全 封閉的水冷馬達。
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
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When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.
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iH Dry Pumps Product Brochure
Edwards has obsoleted all FabWorks and pre-FabWorks Equipment Monitoring products on January 15, 2017
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