我們致力於優良的環境管理 - 這是我們的首要之務。
We are committed to constantly improving our environmental systems and performance.
Download our Environment, Health & Safety Policy
Download our policy on REACH and RoHS compliance
*SEMI = Semiconductor Equipment & Materials International.
*ITRS = International Technology Road-map for Semiconductors
*S23 = Guide for conservation of energy, utilities and materials used by semiconductor manufacturing equipment
To support these aims, we have published a set of Green Goals covering our plans to reduce the impact of our operations of our products.
We will ….
We have strong environmental management systems in place to ensure we achieve our goals.
Download our ISO/OHSAS Certificates
Our MembershipsWe participate in several environmental memberships globally and contribute to case studies, such as the Special Report on GHG Management and Reporting, with Institute of Environmental Management and Assessment (IEMA) the professional membership body for promoting best practice standards in environmental management, auditing and assessment for all industry sectors.
We are a member of:
Contributing to case studies, such as the Special Report on GHG Management and Reporting, with Institute of Environmental Management and Assessment (IEMA), the professional membership body for promoting best practice standards in environmental management, auditing and assessment for all industry sectors.
Actions on Resource Conservation We have an excellent track record in the environment, helping bring benefits
to some of the world’s biggest businesses by reducing customers’ power and water
consumption, treating hazardous waste and remanufacturing used pumps.
Our remanufacturing story is a particularly significant environmental success
story.Imagine a car industry able to offer complete recycling, but that’s what
happened in the world of vacuum pumps. In the last thirty years we are now the
global leader of recycling pumps and remanufacturing is now a significant part
of Edwards service business.
Remanufacturing & ServiceAfter use many Edwards products are contaminated with hazardous process
by-products, and - if disposed of - would need to be treated as hazardous waste.
A global network of service and remanufacturing facilities which safely
decontaminate and remanufacture over 35,000 used vacuum pumps a year. Most
vacuum pumps run 24/7 and are re-used 4-10 times over a 10-20 year lifetime.
That’s equivalent to a car travelling around 2 million miles!
Remanufacture typically involves the reuse of over 90% by weight of a
pump’s components – with a corresponding saving in raw materials and their
embodied carbon dioxide. In Europe we offer a free recycling service for gauges
Energy Efficiency UpgradesOur latest generation energy efficient products not
only offer energy savings, reduced utilities consumption and reduced carbon
emissions, but also potentially offer future-proofing against carbon taxes and
may qualify for “Green Grants”.
We enable customers running older generation
pumping and abatement products to benefit from these features with our upgrade
programs, which include the responsible recycling of upgraded products
returned to us through our remanufacturing operations.
Reducing Our EmissionsOrganic solvents containing Volatile Organic Compounds are a major source of
pollution in the lower atmosphere and especially in built-up areas where
respiratory problems can be caused.
Water based cleaning has eliminated the use of solvents in our production and
remanufacturing processes.In addition, the use of closed-loop recirculating
water systems in our remanufacturing facilities reduces their water consumption
by more than 90%.
Material ContentThere is a growing amount of legislation around the world (for example EU
RoHS Directive*) to eliminate trace levels of heavy metals from electronic
products, as these have the potential to leach out of landfill sites
vacuum equipment is outside the scope of the RoHS Directive, we are implementing
a voluntary policy to eliminate all ‘RoHS 6’ chemicals from our new product
ranges. Information on RoHS compliance of Edwards products can be found on
the product section of our website.
* EU Directive
2011/65/EU on the Restriction of certain Hazardous Substances controls the
levels of lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls
and polybrominated diphenyl ethers in certain categories of electrical
View our RoHS Policy
WasteIt is our policy that all major facilities are certified to ISO14001.
As part of our management systems, our environmental policy incorporates a
number of initiatives to minimize unnecessary waste. For a number of years we
have been implementing a successful recycling policy as part of our active
company policy on reducing landfill waste.
Solid State LightingSolid-state lighting sources, such as light emitting
diodes (LEDs), offer energy savings and environmental benefits compared to
traditional incandescent or fluorescent lamps. In some cases they can offer a
80% energy saving over conventional lighting systems. LEDs are semiconductor
devices manufactured under vacuum using gases that need careful handling –
Edwards vacuum and abatement systems enable the process and protect the
Sollar CellsA photovoltaic solar cell (PV cell) is also a
semiconductor device which, in the presence of light, generates electricity.
Solar cells provide clean renewable energy, producing zero air pollution,
hazardous waste or noise. As economies of scale take effect, the size of the
process chambers has increased – again Edwards vacuum and abatement equipment is
at the forefront of enabling the development of this environmentally beneficial
technology ensuring it is achieved with minimum environmental impact from
Glass CoatingVacuum coated glass is primarily used to control the
solar generated thermal energy load on buildings. Multiple layers comprising
exotic metal oxides create infrared reflecting properties. Reducing the heat
load on buildings reduces the need for electrical power to run air conditioning
in hot countries. Conversely in cold countries these same reflective properties
are used to retain heat and reduce fuel used for heating. By upgrading the
vacuum pumping technology (from diffusion pumps to STP turbo molecular pumps) we
have reduced the energy consumption of this process by up to 95%, with a CO2
reduction of 22.6 tonnes per year.
Biofuel ProductionThe term biofuel applies to any solid, liquid or gaseous
fuel produced from organic (once-living) matter. The word biofuel covers a wide
range of products, some of which are commercially available today and some of
which are still in research and development. Processing this material under
vacuum, using Edwards chemical dry pumps, avoids contamination of oil and water
that is an integral part of other vacuum technologies.
Steel DegassingVacuum degassing (VD) and vacuum oxygen decarburisation (VOD) are used in the
production of specialty steel alloys to reduce the levels of hydrogen, carbon
and other impurities during the secondary steel making process.
Edwards dry mechanical vacuum pumps offer considerable energy savings
compared to the traditional multi-stage steam ejector systems, backed with
liquid ring pumps.
Did you know? That over 50% of the world's solar panels are made using Edwards products!
There are two main ways in which we make a positive impact to the environment; firstly
making our products more efficient and effective at what they do, and secondly
how we manage our impact on the environment within our business.
We care about sustainability and we are working to ensure the things
we do, and the way we do them, become more sustainable. We have made several
major step changes in product design driven by environmental considerations.
Efficient use of resources is crucial in our product design and development,
lowering cost of ownership for customers with particular emphasis on reducing
power and water consumption.Reduced Carbon Emissions of Latest Generation ProductsPrimary PumpsReducing our customers’ energy use in the semiconductor industry process pumps are one of the largest energy users
on a process tool which in turn can account for over a third of a fab’s energy
use (SEMATECH Energy research). The global installed base of semiconductor
vacuum pumps consumes the equivalent energy of Sheffield in the UK or Plano in
We design in energy saving and reduced utility costs
without compromising reliability. Using a platform design process each
successive generation of our primary pumps consumes less energy. For example the
latest generation dry pumps use around 30% less energy than previously. Now,
with the introduction of Active Utility Control (AUC) we reduce consumption of
energy and utilities even further when pumps are idle using signals from the
We make sure that the benefits of our latest generation platform
technology are used throughout our pump range. These benefits are made available
to customers running older generation pumps through Edwards’ energy efficiency
We also advise customers how to minimize energy used by
Reducing global energy consumption is key in the fight against global
warming. In addition to minimising the energy our production facilities and
offices consume, our latest generations of turbo molecular pump ranges enable
our customers to meet their energy reduction targets. Edwards offers upgrade
programmes enabling customers to switch to energy efficient turbo molecular pump
For example, benefits of switching from oil diffusion pumps to STP turbo
Semiconductor manufacturing processes use gases, such as per fluorocarbons
and sulphurhexafluoride, which are of high environmental concern due to their
persistence and high Global Warming Potential (GWP). These substances may have
GWP’s 1000’s of times that of carbon dioxide.
If CO2 has a global warming potential (GWP) of 1 over 100 years, over the
same time period - SF6 has a GWP of 23,900, NF3 has a GWP of 10,970 and CF4 has
a GWP of 6,500
We've been helping our customers achieve high levels
of destruction removal efficiency of these substances since the mid 1990s using
our combustion abatement technology. More recently with plasma technology, our
customers have been able to achieve CO2 reductions of >90% across entire fabs
- in line with The World Semiconductor Council’s targets.For production of flat
panels and emerging environmental devices such as solar panels and LED lighting,
we have developed the Spectra Z and Spectra G Abatement Systems to cope with higher gas
flows. In fact we estimate that Edwards abatement products prevent CO2 output
equivalent to 1% of the UK’s annual CO2 output.
The Atlas range of abatement products use up to 50% less fuel than previous
ranges. Edwards also offers Atlas technology as an energy efficiency upgrade to
previous ranges of abatement products by combining pumps and abatement
systems we have saved energy as well by applying idle mode technology.
We've combined abatement and pumping systems as well as using other
techniques similar to those on pumps, to reduce the environmental impact of
abatement products. This has resulted in energy reductions of up to 50% on some
abatement products such as the Zenith Atlas system.
eZenith is the latest iteration of the Zenith concept which incorporates
state of the art iGX and iXH pumps. The iXH is the most energy efficient pump
for its size ever produced – and the latest Atlas abatement equipment, where
intensive lab work has enabled the size of the combustor to be reduced by about
half without any sacrifice in performance.As a result fuel consumption is
reduced by a similar amount, giving significant environmental and cost
ofownership benefits. In addition, eZenith provides benefits of Space saving and
small footprint centralised controls and speed of install.
A key attraction of the eZenith is that it is already green mode enabled.
Process tools tend to be idle about 25% of the time, and when this happens the
eZenith switches to green mode which reduces the fuel consumption by 90%. Energy
is major item of expenditure in a fab – in Korea it is estimated that Samsung’s
semiconductor activities alone use 1% of all the country’s power – so reduced
running costs and the ability to switch to green mode represent a significant
saving for the customer.
Did you know? That over 8 million tonnes of CO2e was abated in our customer's facilities in the year 2013.
Discover what makes us different...Corporate Responsibility ReportEdwards ISO/OHSAS CertificatesEdwards Leadership TeamVacuum Safety Booklet
When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.
Learn More about Our History